Description
Specification | Details |
---|---|
Brand | ABB |
Part Number | 1KHL160006R0001 |
Product Type | Human Machine Interface (HMI) |
Type | 300MM MCA E-CHUCK ESC Heater |
Dimensions | 135 x 186 x 119 mm |
Weight | 1.2 kg |
Application | Semiconductor Manufacturing |
Function | Heats and regulates ESC temperature during wafer processing |
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